The influence of controlled light induced degradation on hydrogenated amorphousrnsilicon (a -Si:H) based solar cell parameters was studied using low intensity (AMi. S) andrnhigh intensity (-lOAMi.S) illuminations obtained from WACOM solar simulator. Thernlight soaking experiments were done on two f)'Pes of stmctures, namely, pin and p inp inrnsolar cells. The devices were prepared by plasma enhanced chemical vapour depositionrn(PECVD) technique in a commercial J-clwmber PECVD systems On 10*10 cm2 glassrnsubstrate. The effect of various factors such as temperature, i-layer thicknesses, etc., onrnthe degradatiO/I behavior of a-Si:H solar cells were inl'estigated. The paper presents therne.tperimental results obtained from light soaking tests on pin and pilip in samples underrnthese dijJerellt conditions