Reflectance(R), Transmittance(T), and Scattering distribution of thin filmrnTCOs and with their p-I (thin & thick) i-layer stacks have been measUred for variousrnwavelengths. The shape of scattering distributions have been determined by usingrnan easy plot software. The functional dependence of normalised intensity onrn-rnwavelength (A) and scattering angle (8) have been detennined for Asahi U &rnStandard TCO. The thickness of individual layers was determined from reflectancern& transmittance measmements by using an optical simulation software for layerrnstacks. The diffused transmittance determined from transmittance measmement andrnscattering distribution measmements have been compared